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Filtering by: Date 2004 Remove constraint Date: 2004 Keyword electrodiffusion Remove constraint Keyword: electrodiffusion

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Sx61dm30x?file=thumbnail

Electromigration of Damascene copper for IC interconnect

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Keyword

electrodiffusion[remove]1
interconnects (integrated circuit technology)1

Date

2004[remove]1

School

OGI School of Science and Engineering1

Department

Dept. of Electrical and Computer Science1

Resource type

dissertation1

Creator

William Kevin Meyer1

Degree

Ph.D.1

Collection

Scholars Archive1

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