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Filtering by: Date 1996 Remove constraint Date: 1996 Keyword metallic films Remove constraint Keyword: metallic films

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The microstructural effects of metallization and heat treatment on thin gate oxide for use in sub-micron MOSFETs

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Keyword

metal oxide semiconductor field-effect transistors1
metallic films[remove]1
sputtering (physics)1

Date

1996[remove]1

Department

Dept. of Materials Science and Engineering1

Resource type

thesis1

Creator

John M. McCarthy1

Degree

Ph.D.1

Collection

Scholars Archive1

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