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Filtering by: Creator William Kevin Meyer Remove constraint Creator: William Kevin Meyer Date 2004 Remove constraint Date: 2004 Degree Ph.D. Remove constraint Degree: Ph.D.

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Electromigration of Damascene copper for IC interconnect

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Keyword

electrodiffusion1
interconnects (integrated circuit technology)1

Date

2004[remove]1

School

OGI School of Science and Engineering1

Department

Dept. of Electrical and Computer Science1

Resource type

dissertation1

Creator

William Kevin Meyer[remove]1

Degree

Ph.D.[remove]1

Collection

Scholars Archive1

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