Filtering by: Creator John M. McCarthy Remove constraint Creator: John M. McCarthy Date 1996 Remove constraint Date: 1996 Department Dept. of Materials Science and Engineering Remove constraint Department: Dept. of Materials Science and Engineering Keyword sputtering (physics) Remove constraint Keyword: sputtering (physics) Keyword metal oxide semiconductor field-effect transistors Remove constraint Keyword: metal oxide semiconductor field-effect transistors Keyword metallic films Remove constraint Keyword: metallic films Collection Scholars Archive Remove constraint Collection: Scholars Archive Resource type thesis Remove constraint Resource type: thesis